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Etude des mécanismes de rupture de barrières Ta-Si pour la métallisation de cuivre_effet de recuit thermique

MERIDJI Meriem (Faculté des Sciences et Technologies, 2013-06-26)

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- MERIDJI Meriem (1)
Subject
- Barrière de diffusion, siliciures de cuivre, RBS, GIDRX, Cu3Si (1)
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Date Issued
- 2013 (1)
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